Optimization of poly-silicon process for 3C-SiC based MOS devices
In: MRS Online Proceedings Library, Jg. 1246 (2009-12-01), Heft 1
academicJournal
Zugriff:
Titel: |
Optimization of poly-silicon process for 3C-SiC based MOS devices
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Autor/in / Beteiligte Person: | Esteve, R. ; Schöner, A. ; Reshanov, S. A. ; Zetterling, C. M. |
Zeitschrift: | MRS Online Proceedings Library, Jg. 1246 (2009-12-01), Heft 1 |
Veröffentlichung: | 2009 |
Medientyp: | academicJournal |
ISSN: | 0272-9172 (print) ; 1946-4274 (print) |
DOI: | 10.1557/proc-1246-b06-04 |
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