BEoL-integrated ferroelectric RAM for advanced semiconductor technology nodes
In: IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM); (2023-05-01) S. 1-4
Online
Konferenz
Zugriff:
Titel: |
BEoL-integrated ferroelectric RAM for advanced semiconductor technology nodes
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Autor/in / Beteiligte Person: | Mueller, Stefan |
Link: | |
Quelle: | IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM); (2023-05-01) S. 1-4 |
Veröffentlichung: | 2023 |
Medientyp: | Konferenz |
ISBN: | 979-8-3503-1097-9 (print) |
ISSN: | 2380-6338 (print) |
DOI: | 10.1109/IITC/MAM57687.2023.10154837 |
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